The present work presents a new method to calculate the discharge current in the bulk of dielectric films of MEMS capacitive switches. This method takes into account the real MEMS switch with non uniform trapped charge and air gap distributions. Assessment of switches with silicon nitride dielectric film shows that the discharge current transient seems to obey the stretched exponential law. The decay characteristics depend on the polarization field’s polarity, a fact comes along with experimental results obtained from thermally stimulated depolarization currents (TSDC) method used in MIM capacitors.
Τίτλος Δράσης: Ηράκλειτος ΙΙ Τίτλος Πράξης: Μελέτη και βελτιστοποίηση των ηλεκτρικών ιδιοτήτων λεπτών μονοτικών υμενίων που χρησιμοποιούνται σε μικρο-ηλεκτρικά-μηχανικά συστήματα (Mems)
