eng URI http://hdl.handle.net/10795/2987 φυσικές επιστήμες ηλεκτρονική ηλεκτρολογικό υλικό ηλεκτρική ενέργεια The dielectric charging in MEMS capacitive switches is a complex effect. The high electric field during pull-down causes intrinsic free charge migration and dipole orientation as well as charge injection. The macroscopic dipole moment of the first two mechanisms is opposite to the one arising from charge injection. This causes partial compensation hence mitigates the overall charging and increases the device lifetime. The charging due to intrinsic free charge migration and dipole orientation can be monitored under contactless electric field application in the pull-up state. The paper investigates the characteristics of contactless charging and compares them with the ones of contacted charging. The characteristics of the discharging process that follows each charging procedure are also presented. 4 pp. LOMv1.0 creator LOMv1.0 publisher LOMv1.0 Scientific Coordinator LOMv1.0 Project Executing Organisation 2013-07-09 Digital Library of the Operational Programme "Education and Lifelong Learning" abstract types Text Dielectric charging MEMS switches Contactless charging Contacted charging Comparative study http://www.sciencedirect.com/science/article/pii/S0026271413002321 928249 application/pdf http://repository.edulll.gr/edulll/bitstream/10795/2987/2/2987_1.84_%ce%94%ce%97%ce%9c_9_7_13.pdf URI http://hdl.handle.net/10795/2987 LOMv1.0creator 2016-05-04T08:30:32Z LOMv1.0validator 2016-05-04T08:30:32Z LOMv1.0 gre no no Copyright EYD-EPEDBM (Operational Programme "Education and Lifelong Learning")